TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working BACK SPUTTER SHIELD 150MM This

BACK SPUTTER SHIELD 150MM This Aviza Technology 188850 150mm Back Sputter Shield is new surplus

Part No: AS01500-63

Part No: H0399-1

Made in Japan This Advantest AAT-0078A106-1 Controller Computer Module is used working surplus

TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working BACK SPUTTER SHIELD 150MM ThisTEL Tokyo Electron WCPL TRS Chill Plate Transition Stage Station Lithius Working Part No: WCPL TRS Water Controlled Chill Plate Process Station Transition Stage Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087 402532 13, BASE ASSY,FRONT 5010 101316 11 FRAME(CPL 1) 1 5010 306509 11 BRACKET 1 5010 306510 11 BRACKET 1 5010 405033 11